The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method.
用能量法计算
振动轮式微机械角速率
器中梁
力矩一转角非线
关系，分析
种非线影响下器幅频、相频特。
The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method.
用能量法计算振动轮式微机械角速率器中梁力矩一转角非线关系，分析种非线影响下器幅频、相频特。
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