The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.

摘梁的物理性参数尤其是弹性系数对MEMS中器件的性有重的影响。

MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.

机电系统(MEMS)将是21世纪最重的研究领域之一,源器件是MEMS其中一个重分支,其发展直接关系到MEMS在某些领域中的应用。