Air in coating color greatly influences the paper quality and coater runnability.
料中的气体将影质量和机的运行性能。
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These tools include the photoresist spin coater, photolithography tool, developer, and photoresist stripper.
这些工具包括光阻旋涂机、光刻设备、显影和光阻剥。
First, the photoresist spin coater applies a light-sensitive layer to the surface of the wafer and sends it through a soft bake, where the wafer is heated in order to evaporate the solvent from the photoresist.
首先, 光阻旋涂机在晶圆表面涂上一层感光层, 并将其送入软烤工序,在这个过程中晶圆会被加热以蒸发掉光阻中的溶。
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