For electrical properties of MOS capacitors, the C-V curves were obtained by LCR meter (HP4284A), and picoampere meter (HP4140B) was used to measure the J-V curves.
另以感容阻量仪(HP4284A)进行C-V曲线量测;以微安培量仪(HP4140B)进行J-V曲线量测。
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