The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.

摘要悬臂梁的物理性能参尤其是弹性MEMS中微器件的性能有重要的影响。

MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.

微机电(MEMS)是21世纪最重要的研究领域之一,而微能源器件是MEMS其中一个重要分支,其发展直接关到MEMS在某些领域中的应用。