The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.

摘要悬物理性能参数尤其是弹性系数对MEMS中微器件性能有重要影响。

MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.

微机电系统(MEMS)将是21世纪最重要研究领域,微能源器件是MEMS其中个重要分支,其发展直接关系到MEMS在某些领域中应用。