Test results show that nonlinear vibration phenomenon does exist in micromachine vibration beams, and the calculated curves of the formulas derived accords with the measured data.

用推导出的公式得到的计数据数据吻合得较好。

The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method.

用能量法计了振动轮式微机械角速率传梁的力矩一转角的非线性关系，分析了在这种非线性影响下的传幅频、相频特性。