The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method.

法计算了振动轮式微机械角速率传感器中梁的力矩一转角的线关系，分析了在这种线影响下的传感器幅频、相频特。

Test results show that nonlinear vibration phenomenon does exist in micromachine vibration beams, and the calculated curves of the formulas derived accords with the measured data.

导出的公式得到的计算数据与试验数据吻合得较好。