The hydrated silicon dioxide with three layers structure of micron-submicron-millimicron was observed through TEM.
通过电

,观察到水合二氧
硅具有微
亚微
纳
三次结构。
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曼科学——化学 Finally, the wafer is sent to a chemical-mechanical planarization tool, where the metal is ground down so that all that remains is a flat layer of insulating silicon dioxide and conductive copper interconnects that match the pattern from the photomask.
最后, 硅片被送到化学机械平面化设备中,金属
被磨平, 只剩下一
平坦

二氧化硅和与光掩模图案相匹配
导电铜互连
。