The hydrated silicon dioxide with three layers structure of micron-submicron-millimicron was observed through TEM.
通过电镜实验,观察

二氧化硅具有微
亚微
纳
三次结构。
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高级英语短文 Finally, the wafer is sent to a chemical-mechanical planarization tool, where the metal is ground down so that all that remains is a flat layer of insulating silicon dioxide and conductive copper interconnects that match the pattern from the photomask.
最后, 硅片被送到化学机械平面化设备
,金属层被磨平, 只剩下一层平坦
绝缘
氧化硅和与光掩模图案相匹配
导电铜互连层。