micromachine

The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method.

用能量法计算了振动轮微机械速率传感器中梁力矩一非线性关系，分析了在这种非线性影响传感器幅频、相频特性。

Test results show that nonlinear vibration phenomenon does exist in micromachine vibration beams, and the calculated curves of the formulas derived accords with the measured data.

用推导出公计算数据与试验数据吻合较好。