An error compensation control method which can improve contour tracing accuracy of aspherical surface ultraprecise machine is introduced.
介绍了一种可提
非
曲
超精密加工机床
轮廓跟踪精度误差补偿
法。
An error compensation control method which can improve contour tracing accuracy of aspherical surface ultraprecise machine is introduced.
介绍了一种可提非曲超精密加工机床轮廓跟踪精度误差补偿法。
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