The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘
悬臂梁的物理性能参数尤

性系数对MEMS中微器件的性能有着重
的影响。
The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘
悬臂梁的物理性能参数尤

性系数对MEMS中微器件的性能有着重
的影响。
MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.
微机电系统(MEMS)将
21世纪最重
的研究领域之一,而微能源器件
MEMS
中一个重

,
发展直接关系到MEMS在某些领域中的应用。
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