micromachine

The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method.

用能量法计算了振微机械角速率传感器中梁的力矩一转角的非线性关系，分析了在这种非线性影响的传感器幅频、相频特性。

Test results show that nonlinear vibration phenomenon does exist in micromachine vibration beams, and the calculated curves of the formulas derived accords with the measured data.

用推导出的公得到的计算数据与试验数据吻合得较好。